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Results for Field-emission scanning probe lithography

Publications & Outputs

  1. Nanofabrication by field-emission scanning probe lithography and cryogenic plasma etching

    Lenk, C., Hofmann, M., Lenk, S., Kaestner, M., Ivanov, T., Krivoshapkina, Y., Nechepurenko, D., Volland, B., Holz, M., Ahmad, A., Reum, A., Wang, C., Jones, M. E., Durrani, Z. A. K. & Rangelow, I. W., 15/05/2018, In: Microelectronic Engineering. 192, p. 77-82 6 p.

    Research output: Contribution to Journal/MagazineJournal articlepeer-review