Directory Home
Researchers
Departments
Publications
Projects
Activities
Datasets
Home
>
Research
> Browse
Research
Research at Lancaster
Researchers
Departments & Centres
Publications & Outputs
Projects
Activities
Datasets
Results for UV-LIGA,
Publications & Outputs
UV-LIGA microfabrication process for sub-terahertz waveguides utilizing multiple layered SU-8 photoresist
Malek Abadi, S. A.
&
Paoloni, C.
,
8/07/2016
,
In:
Journal of Micromechanics and Microengineering.
26
,
9
,
8 p.
, 095010.
Research output
:
Contribution to Journal/Magazine
›
Journal article
›
peer-review