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Results for UV-LIGA,

Publications & Outputs

  1. UV-LIGA microfabrication process for sub-terahertz waveguides utilizing multiple layered SU-8 photoresist

    Malek Abadi, S. A. & Paoloni, C., 8/07/2016, In : Journal of Micromechanics and Microengineering. 26, 9, 8 p., 095010.

    Research output: Contribution to journalJournal article