Results for vacuum electron device

Publications & Outputs

1. UV-LIGA microfabrication process for sub-terahertz waveguides utilizing multiple layered SU-8 photoresist

   Malek Abadi, S. A. & Paoloni, C., 8/07/2016, In: Journal of Micromechanics and Microengineering. 26, 9, 8 p., 095010.

   Research output: Contribution to Journal/Magazine › Journal article › peer-review