Research output: Contribution to conference - Without ISBN/ISSN › Conference paper › peer-review
| Publication date | 19/09/1996 |
|---|---|
| Number of pages | 8 |
| Pages | 273 |
| <mark>Original language</mark> | English |
| Event | 5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components, - Postdam, Germany Duration: 17/09/1996 → 19/09/1996 |
| Conference | 5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components, |
|---|---|
| Country/Territory | Germany |
| City | Postdam |
| Period | 17/09/96 → 19/09/96 |