Research output: Contribution to conference - Without ISBN/ISSN › Conference paper › peer-review
Publication date | 2013 |
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Number of pages | 2 |
<mark>Original language</mark> | English |
Event | 10th International Workshop on High Aspect Ratio Micro and Nano System Technology (HARMNST) - Berlin, Germany Duration: 21/04/2013 → 24/04/2013 |
Workshop | 10th International Workshop on High Aspect Ratio Micro and Nano System Technology (HARMNST) |
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Country/Territory | Germany |
City | Berlin |
Period | 21/04/13 → 24/04/13 |