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• Si_Nw_Nems_JETP_16_eng_SK

Rights statement: The final publication is available at Springer via http://dx.doi.org/10.1134/S0021364018190037

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## Механический резонанс в кремниевом нанопроводе с высокой добротностью

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Journal publication date 31/10/2018 JETP Letters 7 108 7 522-528 Published 8/10/18 Russian

### Abstract

Resonance properties of nanomechanical resonators based on doubly clamped silicon nanowires, fabricated from silicon-on-insulator and coated with a thin layer of aluminum, were experimentally investigated. Resonance frequencies of the fundamental mode were measured at a temperature of $20\,\mathrm{mK}$ for nanowires of various sizes using the magnetomotive scheme. The measured values of the resonance frequency agree with the estimates obtained from the Euler-Bernoulli theory. The measured internal quality factor of the $5\,\mathrm{\mu m}$-long resonator, $3.62\times10^4$, exceeds the corresponding values of similar resonators investigated at higher temperatures. The structures presented can be used as mass sensors with an expected sensitivity $\sim 6 \times 10^{-20}\,\mathrm{g}\,\mathrm{Hz}^{-1/2}$.

### Bibliographic note

The final publication is available at Springer via http://dx.doi.org/10.1134/S0021364018190037