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    Rights statement: The final publication is available at Springer via http://dx.doi.org/10.1134/S0021364018190037

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Механический резонанс в кремниевом нанопроводе с высокой добротностью

Research output: Contribution to Journal/Magazine › Journal article › peer-review

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Механический резонанс в кремниевом нанопроводе с высокой добротностью. / Presnov, D. E.; Kafanov, Sergey; Dorofeev, A. A. et al.
In: JETP Letters, Vol. 108, No. 7, 31.10.2018, p. 522-528.

Research output: Contribution to Journal/Magazine › Journal article › peer-review

Harvard

Presnov, DE, Kafanov, S, Dorofeev, AA, Bozhev, IV, Trifonov, AS, Pashkin, Y & Krupenin, VA 2018, 'Механический резонанс в кремниевом нанопроводе с высокой добротностью', JETP Letters, vol. 108, no. 7, pp. 522-528. https://doi.org/10.1134/S0021364018190037

APA

Presnov, D. E., Kafanov, S., Dorofeev, A. A., Bozhev, I. V., Trifonov, A. S., Pashkin, Y., & Krupenin, V. A. (2018). Механический резонанс в кремниевом нанопроводе с высокой добротностью. JETP Letters, 108(7), 522-528. https://doi.org/10.1134/S0021364018190037

Vancouver

Presnov DE, Kafanov S, Dorofeev AA, Bozhev IV, Trifonov AS, Pashkin Y et al. Механический резонанс в кремниевом нанопроводе с высокой добротностью. JETP Letters. 2018 Oct 31;108(7):522-528. Epub 2018 Oct 8. doi: 10.1134/S0021364018190037

Author

Presnov, D. E. ; Kafanov, Sergey ; Dorofeev, A. A. et al. / Механический резонанс в кремниевом нанопроводе с высокой добротностью. In: JETP Letters. 2018 ; Vol. 108, No. 7. pp. 522-528.

Bibtex

@article{00fefeabb5ce4b2191e17a9f109845a3,
title = "Механический резонанс в кремниевом нанопроводе с высокой добротностью",
abstract = "Resonance properties of nanomechanical resonators based on doubly clamped silicon nanowires, fabricated from silicon-on-insulator and coated with a thin layer of aluminum, were experimentally investigated. Resonance frequencies of the fundamental mode were measured at a temperature of $20\,\mathrm{mK}$ for nanowires of various sizes using the magnetomotive scheme. The measured values of the resonance frequency agree with the estimates obtained from the Euler-Bernoulli theory. The measured internal quality factor of the $5\,\mathrm{\mu m}$-long resonator, $3.62\times10^4$, exceeds the corresponding values of similar resonators investigated at higher temperatures. The structures presented can be used as mass sensors with an expected sensitivity $\sim 6 \times 10^{-20}\,\mathrm{g}\,\mathrm{Hz}^{-1/2}$.",
keywords = "NEMS",
author = "Presnov, {D. E.} and Sergey Kafanov and Dorofeev, {A. A.} and Bozhev, {I. V.} and Trifonov, {A. S.} and Yuri Pashkin and Krupenin, {V. A.}",
note = "The final publication is available at Springer via http://dx.doi.org/10.1134/S0021364018190037",
year = "2018",
month = oct,
day = "31",
doi = "10.1134/S0021364018190037",
language = "Russian",
volume = "108",
pages = "522--528",
journal = "JETP Letters",
issn = "0021-3640",
publisher = "MAIK NAUKA/INTERPERIODICA/SPRINGER",
number = "7",

}

RIS

TY - JOUR

T1 - Механический резонанс в кремниевом нанопроводе с высокой добротностью

AU - Presnov, D. E.

AU - Kafanov, Sergey

AU - Dorofeev, A. A.

AU - Bozhev, I. V.

AU - Trifonov, A. S.

AU - Pashkin, Yuri

AU - Krupenin, V. A.

N1 - The final publication is available at Springer via http://dx.doi.org/10.1134/S0021364018190037

PY - 2018/10/31

Y1 - 2018/10/31

N2 - Resonance properties of nanomechanical resonators based on doubly clamped silicon nanowires, fabricated from silicon-on-insulator and coated with a thin layer of aluminum, were experimentally investigated. Resonance frequencies of the fundamental mode were measured at a temperature of $20\,\mathrm{mK}$ for nanowires of various sizes using the magnetomotive scheme. The measured values of the resonance frequency agree with the estimates obtained from the Euler-Bernoulli theory. The measured internal quality factor of the $5\,\mathrm{\mu m}$-long resonator, $3.62\times10^4$, exceeds the corresponding values of similar resonators investigated at higher temperatures. The structures presented can be used as mass sensors with an expected sensitivity $\sim 6 \times 10^{-20}\,\mathrm{g}\,\mathrm{Hz}^{-1/2}$.

AB - Resonance properties of nanomechanical resonators based on doubly clamped silicon nanowires, fabricated from silicon-on-insulator and coated with a thin layer of aluminum, were experimentally investigated. Resonance frequencies of the fundamental mode were measured at a temperature of $20\,\mathrm{mK}$ for nanowires of various sizes using the magnetomotive scheme. The measured values of the resonance frequency agree with the estimates obtained from the Euler-Bernoulli theory. The measured internal quality factor of the $5\,\mathrm{\mu m}$-long resonator, $3.62\times10^4$, exceeds the corresponding values of similar resonators investigated at higher temperatures. The structures presented can be used as mass sensors with an expected sensitivity $\sim 6 \times 10^{-20}\,\mathrm{g}\,\mathrm{Hz}^{-1/2}$.

KW - NEMS

U2 - 10.1134/S0021364018190037

DO - 10.1134/S0021364018190037

M3 - Journal article

VL - 108

SP - 522

EP - 528

JO - JETP Letters

JF - JETP Letters

SN - 0021-3640

IS - 7

ER -