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A capacitance and optical method for the static and dynamic characterization of micro electro mechanical systems (MEMS) devices.

Research output: Contribution to journalJournal article


<mark>Journal publication date</mark>1/09/2006
<mark>Journal</mark>Microsystem Technologies
Issue number10-11
Number of pages9
Pages (from-to)1053-1061
<mark>Original language</mark>English


As the micro technology field expands, the need of simple and standardized procedures to precisely evaluate device functionality, realibility and quality of micro electro mechanical systems devices increases. In this paper the application of two empirical methods suitable for the static and the dynamic characterization of micrometersized structures is proposed. The first methodology is based on capacitance measurements and finds simple application in case of comb-finger actuated devices. The second one is based on the Doppler phenomenon combined with laser optical interferometry allowing the characterization of a wide range of structures. The methodologies are applied to a reliability test structure specifically designed at STMicroelectronics for studying the fatigue behaviour of the structural material involved in the fabrication of their commercial products. This case of study highlights how the techniques may be coupled to usual design approaches for completing and verifying the information given by theory and simulations; thus improving the entire development cycle.

Bibliographic note

This work, carried out and published by my team in collaboration with the academic institute ITA, Milan and ST Microelectronics, has been used within ST Microelectronics to both implement enhanced reliability characterisation methods for test structures and more accurate reliability models for the associated MEMS devices (ref. benedetto.vigna@st.com). The impact within STM as a whole has been maximised through publication in their own ST Journal of Research, (ISSN 1828-2105). Wider impact has been enabled through dissemination activities associated with the EU FP5 project 'MACROS' ' IST-2001-34714 and a presentation at the IEEE symposium DTIP 2005. RAE_import_type : Journal article RAE_uoa_type : General Engineering