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A fault simulation methodology for MEMS.
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School of Engineering
Associated organisational unit
Engineering of Microwaves, Terahertz and Light (E-MIT)
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A fault simulation methodology for MEMS.
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Contribution in Book/Report/Proceedings - With ISBN/ISSN
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Overview
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R. Rosing
A. M. D. Richardson
A. P. Dorey
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Publication date
2000
Host publication
Proceedings of the IEE symposium on quality and automation (RESQUA 2000)
Place of Publication
Penang, Malaysia
<mark>Original language</mark>
English