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A novel method for test and calibration of capacitive accelerometers with a fully electrical setup

Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review

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A novel method for test and calibration of capacitive accelerometers with a fully electrical setup. / Dumas, N.; Azaies, F.; Mailly, F. et al.
Design and Diagnostics of Electronic Circuits and Systems, 2008. DDECS 2008. 11th IEEE Workshop on . ed. / B Straube; M Drutarovsky; M Renovell; P Gramata; M Fischerova. LOS ALAMITOS: IEEE COMPUTER SOC, 2008. p. 304-309.

Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review

Harvard

Dumas, N, Azaies, F, Mailly, F, Richardson, A & Nouet, P 2008, A novel method for test and calibration of capacitive accelerometers with a fully electrical setup. in B Straube, M Drutarovsky, M Renovell, P Gramata & M Fischerova (eds), Design and Diagnostics of Electronic Circuits and Systems, 2008. DDECS 2008. 11th IEEE Workshop on . IEEE COMPUTER SOC, LOS ALAMITOS, pp. 304-309. https://doi.org/10.1109/DDECS.2008.4538807

APA

Dumas, N., Azaies, F., Mailly, F., Richardson, A., & Nouet, P. (2008). A novel method for test and calibration of capacitive accelerometers with a fully electrical setup. In B. Straube, M. Drutarovsky, M. Renovell, P. Gramata, & M. Fischerova (Eds.), Design and Diagnostics of Electronic Circuits and Systems, 2008. DDECS 2008. 11th IEEE Workshop on (pp. 304-309). IEEE COMPUTER SOC. https://doi.org/10.1109/DDECS.2008.4538807

Vancouver

Dumas N, Azaies F, Mailly F, Richardson A, Nouet P. A novel method for test and calibration of capacitive accelerometers with a fully electrical setup. In Straube B, Drutarovsky M, Renovell M, Gramata P, Fischerova M, editors, Design and Diagnostics of Electronic Circuits and Systems, 2008. DDECS 2008. 11th IEEE Workshop on . LOS ALAMITOS: IEEE COMPUTER SOC. 2008. p. 304-309 doi: 10.1109/DDECS.2008.4538807

Author

Dumas, N. ; Azaies, F. ; Mailly, F. et al. / A novel method for test and calibration of capacitive accelerometers with a fully electrical setup. Design and Diagnostics of Electronic Circuits and Systems, 2008. DDECS 2008. 11th IEEE Workshop on . editor / B Straube ; M Drutarovsky ; M Renovell ; P Gramata ; M Fischerova. LOS ALAMITOS : IEEE COMPUTER SOC, 2008. pp. 304-309

Bibtex

@inproceedings{29f3bce34a054a7ab56a23578015a57c,
title = "A novel method for test and calibration of capacitive accelerometers with a fully electrical setup",
abstract = "Test and calibration cost is a bottleneck to reduce the overall production cost of MEMS sensors. One main reason is the cost of generating non electrical test stimuli. Hence, replacing the functional multi-domain test equipments with electrical ones arouses interest The focus of this paper is on sensitivity testing and calibration through fully electrical measurements. A new method based art analytical expressions of the sensitivity with respect to both physical parameters of the structure and electrical test parameters is proposed The accuracy of the method is evaluated by mean of a high level model including global and intra-die mismatch variations. It is shown that an accurate estimation of the sensitivity can be achieved using only electrical measurements and that the dispersions on the sensitivity can be divided by about 7 after the calibration procedure. These results are promising enough for high volume production of low-cost sensors.",
author = "N. Dumas and F. Azaies and F. Mailly and A. Richardson and P. Nouet",
year = "2008",
doi = "10.1109/DDECS.2008.4538807",
language = "English",
isbn = "978-1-4244-2276-0",
pages = "304--309",
editor = "B Straube and M Drutarovsky and M Renovell and P Gramata and M Fischerova",
booktitle = "Design and Diagnostics of Electronic Circuits and Systems, 2008. DDECS 2008. 11th IEEE Workshop on",
publisher = "IEEE COMPUTER SOC",

}

RIS

TY - GEN

T1 - A novel method for test and calibration of capacitive accelerometers with a fully electrical setup

AU - Dumas, N.

AU - Azaies, F.

AU - Mailly, F.

AU - Richardson, A.

AU - Nouet, P.

PY - 2008

Y1 - 2008

N2 - Test and calibration cost is a bottleneck to reduce the overall production cost of MEMS sensors. One main reason is the cost of generating non electrical test stimuli. Hence, replacing the functional multi-domain test equipments with electrical ones arouses interest The focus of this paper is on sensitivity testing and calibration through fully electrical measurements. A new method based art analytical expressions of the sensitivity with respect to both physical parameters of the structure and electrical test parameters is proposed The accuracy of the method is evaluated by mean of a high level model including global and intra-die mismatch variations. It is shown that an accurate estimation of the sensitivity can be achieved using only electrical measurements and that the dispersions on the sensitivity can be divided by about 7 after the calibration procedure. These results are promising enough for high volume production of low-cost sensors.

AB - Test and calibration cost is a bottleneck to reduce the overall production cost of MEMS sensors. One main reason is the cost of generating non electrical test stimuli. Hence, replacing the functional multi-domain test equipments with electrical ones arouses interest The focus of this paper is on sensitivity testing and calibration through fully electrical measurements. A new method based art analytical expressions of the sensitivity with respect to both physical parameters of the structure and electrical test parameters is proposed The accuracy of the method is evaluated by mean of a high level model including global and intra-die mismatch variations. It is shown that an accurate estimation of the sensitivity can be achieved using only electrical measurements and that the dispersions on the sensitivity can be divided by about 7 after the calibration procedure. These results are promising enough for high volume production of low-cost sensors.

U2 - 10.1109/DDECS.2008.4538807

DO - 10.1109/DDECS.2008.4538807

M3 - Conference contribution/Paper

SN - 978-1-4244-2276-0

SP - 304

EP - 309

BT - Design and Diagnostics of Electronic Circuits and Systems, 2008. DDECS 2008. 11th IEEE Workshop on

A2 - Straube, B

A2 - Drutarovsky, M

A2 - Renovell, M

A2 - Gramata, P

A2 - Fischerova, M

PB - IEEE COMPUTER SOC

CY - LOS ALAMITOS

ER -