Research output: Contribution to Journal/Magazine › Journal article › peer-review
Research output: Contribution to Journal/Magazine › Journal article › peer-review
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TY - JOUR
T1 - Analysis of Subsurface Imaging and Effect of Contact Elasticity in the Ultrasonic Force Microscope
AU - Yamanaka, Kazushi
AU - Ogiso, Hisato
AU - Kolosov, Oleg
PY - 1994/5
Y1 - 1994/5
N2 - We examined, both theoretically and experimentally, the characteristics of subsurface imaging with nanometer resolution and the effect of contact elasticity in the ultrasonic force microscope (UFM). In particular, the effect of the surface energy and effective elasticity on the maximum tip-sample force and the shift of the averaged tip-sample distance were examined. Furthermore, kink formation in the cantilever deflection (z(a)) against the ultrasonic frequency vibration (UFV) amplitude (a) characteristics was predicted. This model was used to explain experimental observations in UFM, such as the features of the measured z(a)(a) curve and the damping of the cantilever torsion vibration by the UFV. Moreover. the previously reported lateral ultrasonic force microscope image of subsurface features was explained by the response of subsurface edge dislocation to a large instantaneous force enhanced by the UFV.
AB - We examined, both theoretically and experimentally, the characteristics of subsurface imaging with nanometer resolution and the effect of contact elasticity in the ultrasonic force microscope (UFM). In particular, the effect of the surface energy and effective elasticity on the maximum tip-sample force and the shift of the averaged tip-sample distance were examined. Furthermore, kink formation in the cantilever deflection (z(a)) against the ultrasonic frequency vibration (UFV) amplitude (a) characteristics was predicted. This model was used to explain experimental observations in UFM, such as the features of the measured z(a)(a) curve and the damping of the cantilever torsion vibration by the UFV. Moreover. the previously reported lateral ultrasonic force microscope image of subsurface features was explained by the response of subsurface edge dislocation to a large instantaneous force enhanced by the UFV.
U2 - 10.1143/JJAP.33.3197
DO - 10.1143/JJAP.33.3197
M3 - Journal article
VL - 33
SP - 3197
EP - 3203
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
SN - 0021-4922
IS - 5B
ER -