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Bias superposition: an on-line test strategy for a MEMS based conductivity sensor

Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review

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Bias superposition: an on-line test strategy for a MEMS based conductivity sensor. / Jeffrey, C ; Xu, Z ; Richardson, A .
ETS 2005:10th IEEE European Test Symposium, Proceedings. LOS ALAMITOS: IEEE COMPUTER SOC, 2005. p. 88-93.

Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review

Harvard

Jeffrey, C, Xu, Z & Richardson, A 2005, Bias superposition: an on-line test strategy for a MEMS based conductivity sensor. in ETS 2005:10th IEEE European Test Symposium, Proceedings. IEEE COMPUTER SOC, LOS ALAMITOS, pp. 88-93. https://doi.org/10.1109/ETS.2005.9

APA

Jeffrey, C., Xu, Z., & Richardson, A. (2005). Bias superposition: an on-line test strategy for a MEMS based conductivity sensor. In ETS 2005:10th IEEE European Test Symposium, Proceedings (pp. 88-93). IEEE COMPUTER SOC. https://doi.org/10.1109/ETS.2005.9

Vancouver

Jeffrey C, Xu Z, Richardson A. Bias superposition: an on-line test strategy for a MEMS based conductivity sensor. In ETS 2005:10th IEEE European Test Symposium, Proceedings. LOS ALAMITOS: IEEE COMPUTER SOC. 2005. p. 88-93 doi: 10.1109/ETS.2005.9

Author

Jeffrey, C ; Xu, Z ; Richardson, A . / Bias superposition : an on-line test strategy for a MEMS based conductivity sensor. ETS 2005:10th IEEE European Test Symposium, Proceedings. LOS ALAMITOS : IEEE COMPUTER SOC, 2005. pp. 88-93

Bibtex

@inproceedings{bb9e2e6831044e118c3fa640a57341cf,
title = "Bias superposition: an on-line test strategy for a MEMS based conductivity sensor",
abstract = "A novel on-line monitoring technique for a range of MEMS and integrated sensor systems is presented based on the injection of a test stimuli into the bias structure of transducer functions. The technique {"}Bias Superposition{"} utilises both signal injection and signal extraction techniques to achieve an indication of structural integrity of the transducer and interface. The technique has been successfully applied to a thick film conductance sensor.",
author = "C Jeffrey and Z Xu and A Richardson",
year = "2005",
doi = "10.1109/ETS.2005.9",
language = "English",
isbn = "0-7695-2341-2",
pages = "88--93",
booktitle = "ETS 2005:10th IEEE European Test Symposium, Proceedings",
publisher = "IEEE COMPUTER SOC",

}

RIS

TY - GEN

T1 - Bias superposition

T2 - an on-line test strategy for a MEMS based conductivity sensor

AU - Jeffrey, C

AU - Xu, Z

AU - Richardson, A

PY - 2005

Y1 - 2005

N2 - A novel on-line monitoring technique for a range of MEMS and integrated sensor systems is presented based on the injection of a test stimuli into the bias structure of transducer functions. The technique "Bias Superposition" utilises both signal injection and signal extraction techniques to achieve an indication of structural integrity of the transducer and interface. The technique has been successfully applied to a thick film conductance sensor.

AB - A novel on-line monitoring technique for a range of MEMS and integrated sensor systems is presented based on the injection of a test stimuli into the bias structure of transducer functions. The technique "Bias Superposition" utilises both signal injection and signal extraction techniques to achieve an indication of structural integrity of the transducer and interface. The technique has been successfully applied to a thick film conductance sensor.

U2 - 10.1109/ETS.2005.9

DO - 10.1109/ETS.2005.9

M3 - Conference contribution/Paper

SN - 0-7695-2341-2

SP - 88

EP - 93

BT - ETS 2005:10th IEEE European Test Symposium, Proceedings

PB - IEEE COMPUTER SOC

CY - LOS ALAMITOS

ER -