This paper presents a new modelling method for MEMS components based on the Cosserat theory. By constructing Cosserat rod elements, generating symbolic code and developing numeric code in VHDL-AMS for selected demonstrators, we are able to effectively simulate and predict the essential linear and nonlinear behaviour in estimating system performance and guiding the reliability verification process. The simplicity of the Cosserat approach follows from the possibility to formulate interconnected slender components in terms of a network of quasi-rigid bodies (Cosserat elements). This modularization fits well into the behavioural modelling where a relatively low degree of freedom is needed to capture salient features of the system. Furthermore, the manner in which Cosserat elements and their interactions are formulated makes this method ideally suited for nonlinear dynamic simulations in the presence of large deflections.
The main academic impact is the demonstration of a modelling strategy (Cosserat theory) that had previously not been used in the microtechnology field and had potential to deliver additional functionality within behavioural MEMS models. The work demonstrates successful collaboration between engineers and physicists. Uptake of the technique by Coventor is in progress (ref. firstname.lastname@example.org) and work on haptic sensing within the EPSRC Grand Challenge 3D Mintigration (ref. M.Desmulliez@hw.ac.uk). The work has also contributed to the launch of a collaborative project addressing the modelling of damping in MEMS (email@example.com) and has been presented at the European symposia (DTIP). RAE_import_type : Journal article RAE_uoa_type : General Engineering