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Fault simulation for MEMS

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Publication date1/06/1999
Host publicationIntelligent and Self-Validating Sensors (Ref. No. 1999/160), IEE Colloquium on
Pages7/1 -7/6
Number of pages0
<mark>Original language</mark>Undefined/Unknown


Integrated test technology is becoming critically important for MEMS due to the high reliability and safety critical applications targeted. High quality levels in production require efficient test strategies that are properly validated. Fault simulation and testability analysis are critical utilities required to support this process. This paper will discuss methods for achieving test support based on the extension of tools and techniques currently being introduced into the mixed signal ASIC market