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Generation of component level fault models for MEMS

Research output: Contribution to journalJournal article

Published

Associated organisational unit

Journal publication date2002
JournalMicroelectronics Journal
Journal number10
Volume33
Number of pages8
Pages861-868
Original languageEnglish

Abstract

Component level (nodal) simulations have been proposed to both implement closed loop simulation of complete microsystems to support the migration to shorter design cycles and implement fault models of micromechanical components. Within such a simulation environment, library cells in the form of behavioural models are used for the basic components of microelectromechanical (MEM) transducers, such as beams, plates, comb-drives and membranes. This paper presents both methodologies to generate the model parameters required for the implementation of accurate component fault models and simulation results from representative defective structures in a MEMS product.