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Generation of component level fault models for MEMS

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Generation of component level fault models for MEMS. / Rosing, R.; Reichenbach, R.; Richardson, A.
In: Microelectronics Journal, Vol. 33, No. 10, 2002, p. 861-868.

Research output: Contribution to Journal/Magazine › Journal article › peer-review

Harvard

Rosing, R, Reichenbach, R & Richardson, A 2002, 'Generation of component level fault models for MEMS', Microelectronics Journal, vol. 33, no. 10, pp. 861-868. https://doi.org/10.1016/S0026-2692(02)00097-6

APA

Rosing, R., Reichenbach, R., & Richardson, A. (2002). Generation of component level fault models for MEMS. Microelectronics Journal, 33(10), 861-868. https://doi.org/10.1016/S0026-2692(02)00097-6

Vancouver

Rosing R, Reichenbach R, Richardson A. Generation of component level fault models for MEMS. Microelectronics Journal. 2002;33(10):861-868. doi: 10.1016/S0026-2692(02)00097-6

Author

Rosing, R. ; Reichenbach, R. ; Richardson, A. / Generation of component level fault models for MEMS. In: Microelectronics Journal. 2002 ; Vol. 33, No. 10. pp. 861-868.

Bibtex

@article{8e501ac1495a48eba873a397b7898310,
title = "Generation of component level fault models for MEMS",
abstract = "Component level (nodal) simulations have been proposed to both implement closed loop simulation of complete microsystems to support the migration to shorter design cycles and implement fault models of micromechanical components. Within such a simulation environment, library cells in the form of behavioural models are used for the basic components of microelectromechanical (MEM) transducers, such as beams, plates, comb-drives and membranes. This paper presents both methodologies to generate the model parameters required for the implementation of accurate component fault models and simulation results from representative defective structures in a MEMS product.",
author = "R. Rosing and R. Reichenbach and A. Richardson",
year = "2002",
doi = "10.1016/S0026-2692(02)00097-6",
language = "English",
volume = "33",
pages = "861--868",
journal = "Microelectronics Journal",
issn = "0026-2692",
publisher = "Elsevier Limited",
number = "10",

}

RIS

TY - JOUR

T1 - Generation of component level fault models for MEMS

AU - Rosing, R.

AU - Reichenbach, R.

AU - Richardson, A.

PY - 2002

Y1 - 2002

N2 - Component level (nodal) simulations have been proposed to both implement closed loop simulation of complete microsystems to support the migration to shorter design cycles and implement fault models of micromechanical components. Within such a simulation environment, library cells in the form of behavioural models are used for the basic components of microelectromechanical (MEM) transducers, such as beams, plates, comb-drives and membranes. This paper presents both methodologies to generate the model parameters required for the implementation of accurate component fault models and simulation results from representative defective structures in a MEMS product.

AB - Component level (nodal) simulations have been proposed to both implement closed loop simulation of complete microsystems to support the migration to shorter design cycles and implement fault models of micromechanical components. Within such a simulation environment, library cells in the form of behavioural models are used for the basic components of microelectromechanical (MEM) transducers, such as beams, plates, comb-drives and membranes. This paper presents both methodologies to generate the model parameters required for the implementation of accurate component fault models and simulation results from representative defective structures in a MEMS product.

U2 - 10.1016/S0026-2692(02)00097-6

DO - 10.1016/S0026-2692(02)00097-6

M3 - Journal article

VL - 33

SP - 861

EP - 868

JO - Microelectronics Journal

JF - Microelectronics Journal

SN - 0026-2692

IS - 10

ER -