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High-frequency metallic nanomechanical resonators

Research output: Contribution to journalJournal article

Article number043112
<mark>Journal publication date</mark>28/01/2008
<mark>Journal</mark>Applied Physics Letters
Issue number4
Number of pages3
Pages (from-to)-
<mark>Original language</mark>English


We developed a technology to fabricate fully metallic doubly clamped beams working as nanomechanical resonators. Measured with a magnetomotive detection scheme, the beams, made of polycrystalline metal films, show as good quality as previously reported ones made of single crystal materials, such as Si, GaAs, AlN, and SiC. Our method is compatible with the conventional fabrication process for nanoscale electronic circuits and thus offers a possibility of easily integrating the beams into superconducting charge and flux qubits and single-electron transistors as well as coupling them to coplanar waveguide resonators. (C) 2008 American Institute of Physics.