This paper presents the development of integrated sensors for health monitoring applications in microsystems. Intelligent health monitoring is an emerging method for early diagnostic of the status or ¿health¿ of electronic systems and products under operation based on embedded tests. In this approach miniature sensors are used to monitor the key parameters of the package/system for example temperature, pressure, stress and humidity. Based on the outputs of the sensors stimuli are then used to test the responses of the system to determine its behavior. Thus early warning of system fault or failure can be obtained and measures taken for repair work or replacement of the system. We have been developing integrated sensors on a chip for health monitoring applications in electronic systems. Integrated sensors on LiNbO3 and silicon substrates are being investigated. In this paper we report the development of discrete sensors and the integration methods. Thin film temperature sensor arrays have been developed and tested as embedded sensors in substrate assemblies. SAW based low cost sensors have been designed and fabricated for humidity monitoring. Methods for sensor integration and the preliminary results are described.