Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review
Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review
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TY - GEN
T1 - Integrated sensors for health monitoring in advanced electronic systems
AU - Wang, C.H.
AU - Liu, Y.
AU - Desmulliez, M.
AU - Richardson, A.
PY - 2009/11/1
Y1 - 2009/11/1
N2 - This paper presents the development of integrated sensors for health monitoring applications in microsystems. Intelligent health monitoring is an emerging method for early diagnostic of the status or ¿health¿ of electronic systems and products under operation based on embedded tests. In this approach miniature sensors are used to monitor the key parameters of the package/system for example temperature, pressure, stress and humidity. Based on the outputs of the sensors stimuli are then used to test the responses of the system to determine its behavior. Thus early warning of system fault or failure can be obtained and measures taken for repair work or replacement of the system. We have been developing integrated sensors on a chip for health monitoring applications in electronic systems. Integrated sensors on LiNbO3 and silicon substrates are being investigated. In this paper we report the development of discrete sensors and the integration methods. Thin film temperature sensor arrays have been developed and tested as embedded sensors in substrate assemblies. SAW based low cost sensors have been designed and fabricated for humidity monitoring. Methods for sensor integration and the preliminary results are described.
AB - This paper presents the development of integrated sensors for health monitoring applications in microsystems. Intelligent health monitoring is an emerging method for early diagnostic of the status or ¿health¿ of electronic systems and products under operation based on embedded tests. In this approach miniature sensors are used to monitor the key parameters of the package/system for example temperature, pressure, stress and humidity. Based on the outputs of the sensors stimuli are then used to test the responses of the system to determine its behavior. Thus early warning of system fault or failure can be obtained and measures taken for repair work or replacement of the system. We have been developing integrated sensors on a chip for health monitoring applications in electronic systems. Integrated sensors on LiNbO3 and silicon substrates are being investigated. In this paper we report the development of discrete sensors and the integration methods. Thin film temperature sensor arrays have been developed and tested as embedded sensors in substrate assemblies. SAW based low cost sensors have been designed and fabricated for humidity monitoring. Methods for sensor integration and the preliminary results are described.
KW - LiNbO3
KW - SAW sensors
KW - Si
KW - SiP
KW - advanced electronic systems
KW - discrete sensors
KW - embedded tests
KW - humidity
KW - humidity monitoring
KW - integrated sensors
KW - intelligent health monitoring
KW - microsystems
KW - miniature sensors
KW - pressure
KW - stress
KW - system fault
KW - temperature
KW - thin film temperature sensor arrays
KW - application specific integrated circuits
KW - humidity sensors
KW - integrated circuit reliability
KW - intelligent sensors
KW - sensor arrays
KW - surface acoustic wave sensors
KW - system-in-package
KW - temperature sensors
KW - thin film sensors
U2 - 10.1109/IDT.2009.5404166
DO - 10.1109/IDT.2009.5404166
M3 - Conference contribution/Paper
SN - 978-1-4244-5748-9
SP - 1
EP - 6
BT - Design and Test Workshop (IDT), 2009 4th International
PB - IEEE
ER -