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Integrated Test Support for Micro- Electro-Mechanical-Systems (MEMS)

Research output: Contribution to conference Conference paper

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Publication date19/09/1996
Number of pages8
Pages273
<mark>Original language</mark>English
Event5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components, - Postdam, Germany

Conference

Conference5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components,
CountryGermany
CityPostdam
Period17/09/9619/09/96