Research output: Contribution to conference - Without ISBN/ISSN › Conference paper › peer-review
Publication date | 19/09/1996 |
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Number of pages | 8 |
Pages | 273 |
<mark>Original language</mark> | English |
Event | 5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components, - Postdam, Germany Duration: 17/09/1996 → 19/09/1996 |
Conference | 5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components, |
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Country/Territory | Germany |
City | Postdam |
Period | 17/09/96 → 19/09/96 |