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Integrated Test Support for Micro- Electro-Mechanical-Systems (MEMS)

Research output: Contribution to conference - Without ISBN/ISSN › Conference paper › peer-review

Published

Standard

Integrated Test Support for Micro- Electro-Mechanical-Systems (MEMS). / Richardson, Andrew; Vermeiren, W ; Straube, B et al.
1996. 273 Paper presented at 5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components, Postdam, Germany.

Research output: Contribution to conference - Without ISBN/ISSN › Conference paper › peer-review

Harvard

Richardson, A, Vermeiren, W, Straube, B & Olbrich, T 1996, 'Integrated Test Support for Micro- Electro-Mechanical-Systems (MEMS)', Paper presented at 5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components, Postdam, Germany, 17/09/96 - 19/09/96 pp. 273.

APA

Richardson, A., Vermeiren, W., Straube, B., & Olbrich, T. (1996). Integrated Test Support for Micro- Electro-Mechanical-Systems (MEMS). 273. Paper presented at 5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components, Postdam, Germany.

Vancouver

Richardson A, Vermeiren W, Straube B, Olbrich T. Integrated Test Support for Micro- Electro-Mechanical-Systems (MEMS). 1996. Paper presented at 5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components, Postdam, Germany.

Author

Richardson, Andrew ; Vermeiren, W ; Straube, B et al. / Integrated Test Support for Micro- Electro-Mechanical-Systems (MEMS). Paper presented at 5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components, Postdam, Germany.8 p.

Bibtex

@conference{6695a1e2bdb2406b84bd64206f96e180,
title = "Integrated Test Support for Micro- Electro-Mechanical-Systems (MEMS)",
author = "Andrew Richardson and W Vermeiren and B Straube and Thomas Olbrich",
year = "1996",
month = sep,
day = "19",
language = "English",
pages = "273",
note = "5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components, ; Conference date: 17-09-1996 Through 19-09-1996",

}

RIS

TY - CONF

T1 - Integrated Test Support for Micro- Electro-Mechanical-Systems (MEMS)

AU - Richardson, Andrew

AU - Vermeiren, W

AU - Straube, B

AU - Olbrich, Thomas

PY - 1996/9/19

Y1 - 1996/9/19

M3 - Conference paper

SP - 273

T2 - 5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components,

Y2 - 17 September 1996 through 19 September 1996

ER -