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Investigation of local piezoelectric properties of piezoelectric transducers by acoustic microscopy

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<mark>Journal publication date</mark>1/12/1988
<mark>Journal</mark>Ultrasonics Symposium Proceedings
Volume2
Number of pages3
Pages (from-to)775-777
Publication statusPublished
Original languageEnglish
EventIEEE 1988 Ultrasonics Symposium - Proceedings - Chicago, IL, USA
Duration: 2/10/19885/10/1988

Conference

ConferenceIEEE 1988 Ultrasonics Symposium - Proceedings
CityChicago, IL, USA
Period2/10/885/10/88

Abstract

Local piezoelectric properties of film and plate piezoelectric transducers have been studied by transmission acoustic microscopy methods at a frequency of 450 MHz with a resolution of 3 μm. One-dimensional profiles and gray-scale acoustic images of the microstructure have been obtained. It is concluded that acoustic microscopy can be used effectively for the investigation of the nonmechanical characteristics of piezoelectric transducer specimens.