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LIGA-based Slow Wave Structure for a THz Vacuum Amplifier

Research output: Contribution to conferenceConference paper

Published

Publication date2013
Number of pages2
Original languageEnglish

Workshop

Workshop10th International Workshop on High Aspect Ratio Micro and Nano System Technology (HARMNST)
CountryGermany
CityBerlin
Period21/04/1324/04/13