Research output: Contribution to conference - Without ISBN/ISSN › Conference paper › peer-review
| Publication date | 2013 |
|---|---|
| Number of pages | 2 |
| <mark>Original language</mark> | English |
| Event | 10th International Workshop on High Aspect Ratio Micro and Nano System Technology (HARMNST) - Berlin, Germany Duration: 21/04/2013 → 24/04/2013 |
| Workshop | 10th International Workshop on High Aspect Ratio Micro and Nano System Technology (HARMNST) |
|---|---|
| Country/Territory | Germany |
| City | Berlin |
| Period | 21/04/13 → 24/04/13 |