Final published version
Research output: Contribution to Journal/Magazine › Journal article › peer-review
Research output: Contribution to Journal/Magazine › Journal article › peer-review
}
TY - JOUR
T1 - Modal Decomposition in Goalpost Micro/Nano Electro-Mechanical Devices
AU - Collin, Eddy
AU - Defoort, M.
AU - Lulla, K. J.
AU - Guidi, J.
AU - Dufresnes, S.
AU - Godfrin, H.
PY - 2014/4
Y1 - 2014/4
N2 - We have studied the first three symmetric out-of-plane flexural resonance modes of a goalpost silicon micro-mechanical device. Measurements have been performed at 4.2 K in vacuum, demonstrating high Qs and good linear properties. Numerical simulations have been realized to fit the resonance frequencies and produce the mode shapes. These mode shapes are complex, since they involve distortions of two coupled orthogonal bars. Nonetheless, analytic expressions have been developed to reproduce these numerical results, with no free parameters. Owing to their generality they are extremely helpful, in particular to identify the parameters which may limit the performances of the device. The overall agreement is very good, and has been verified on our nano-mechanical version of the device.
AB - We have studied the first three symmetric out-of-plane flexural resonance modes of a goalpost silicon micro-mechanical device. Measurements have been performed at 4.2 K in vacuum, demonstrating high Qs and good linear properties. Numerical simulations have been realized to fit the resonance frequencies and produce the mode shapes. These mode shapes are complex, since they involve distortions of two coupled orthogonal bars. Nonetheless, analytic expressions have been developed to reproduce these numerical results, with no free parameters. Owing to their generality they are extremely helpful, in particular to identify the parameters which may limit the performances of the device. The overall agreement is very good, and has been verified on our nano-mechanical version of the device.
KW - Dynamics
KW - Micro/nano-mechanics
KW - Resonance modes
U2 - 10.1007/s10909-013-0919-1
DO - 10.1007/s10909-013-0919-1
M3 - Journal article
VL - 175
SP - 442
EP - 448
JO - Journal of Low Temperature Physics
JF - Journal of Low Temperature Physics
SN - 0022-2291
IS - 1-2
ER -