Home > Research > Publications & Outputs > Modal Decomposition in Goalpost Micro/Nano Elec...

Links

Text available via DOI:

View graph of relations

Modal Decomposition in Goalpost Micro/Nano Electro-Mechanical Devices

Research output: Contribution to Journal/MagazineJournal articlepeer-review

Published

Standard

Modal Decomposition in Goalpost Micro/Nano Electro-Mechanical Devices. / Collin, Eddy; Defoort, M.; Lulla, K. J. et al.
In: Journal of Low Temperature Physics, Vol. 175, No. 1-2, 04.2014, p. 442-448.

Research output: Contribution to Journal/MagazineJournal articlepeer-review

Harvard

Collin, E, Defoort, M, Lulla, KJ, Guidi, J, Dufresnes, S & Godfrin, H 2014, 'Modal Decomposition in Goalpost Micro/Nano Electro-Mechanical Devices', Journal of Low Temperature Physics, vol. 175, no. 1-2, pp. 442-448. https://doi.org/10.1007/s10909-013-0919-1

APA

Collin, E., Defoort, M., Lulla, K. J., Guidi, J., Dufresnes, S., & Godfrin, H. (2014). Modal Decomposition in Goalpost Micro/Nano Electro-Mechanical Devices. Journal of Low Temperature Physics, 175(1-2), 442-448. https://doi.org/10.1007/s10909-013-0919-1

Vancouver

Collin E, Defoort M, Lulla KJ, Guidi J, Dufresnes S, Godfrin H. Modal Decomposition in Goalpost Micro/Nano Electro-Mechanical Devices. Journal of Low Temperature Physics. 2014 Apr;175(1-2):442-448. Epub 2013 Oct 1. doi: 10.1007/s10909-013-0919-1

Author

Collin, Eddy ; Defoort, M. ; Lulla, K. J. et al. / Modal Decomposition in Goalpost Micro/Nano Electro-Mechanical Devices. In: Journal of Low Temperature Physics. 2014 ; Vol. 175, No. 1-2. pp. 442-448.

Bibtex

@article{23ef64dc6aeb44f0aaef263f9a04b669,
title = "Modal Decomposition in Goalpost Micro/Nano Electro-Mechanical Devices",
abstract = "We have studied the first three symmetric out-of-plane flexural resonance modes of a goalpost silicon micro-mechanical device. Measurements have been performed at 4.2 K in vacuum, demonstrating high Qs and good linear properties. Numerical simulations have been realized to fit the resonance frequencies and produce the mode shapes. These mode shapes are complex, since they involve distortions of two coupled orthogonal bars. Nonetheless, analytic expressions have been developed to reproduce these numerical results, with no free parameters. Owing to their generality they are extremely helpful, in particular to identify the parameters which may limit the performances of the device. The overall agreement is very good, and has been verified on our nano-mechanical version of the device.",
keywords = "Dynamics, Micro/nano-mechanics, Resonance modes ",
author = "Eddy Collin and M. Defoort and Lulla, {K. J.} and J. Guidi and S. Dufresnes and H. Godfrin",
year = "2014",
month = apr,
doi = "10.1007/s10909-013-0919-1",
language = "English",
volume = "175",
pages = "442--448",
journal = "Journal of Low Temperature Physics",
issn = "0022-2291",
publisher = "SPRINGER/PLENUM PUBLISHERS",
number = "1-2",

}

RIS

TY - JOUR

T1 - Modal Decomposition in Goalpost Micro/Nano Electro-Mechanical Devices

AU - Collin, Eddy

AU - Defoort, M.

AU - Lulla, K. J.

AU - Guidi, J.

AU - Dufresnes, S.

AU - Godfrin, H.

PY - 2014/4

Y1 - 2014/4

N2 - We have studied the first three symmetric out-of-plane flexural resonance modes of a goalpost silicon micro-mechanical device. Measurements have been performed at 4.2 K in vacuum, demonstrating high Qs and good linear properties. Numerical simulations have been realized to fit the resonance frequencies and produce the mode shapes. These mode shapes are complex, since they involve distortions of two coupled orthogonal bars. Nonetheless, analytic expressions have been developed to reproduce these numerical results, with no free parameters. Owing to their generality they are extremely helpful, in particular to identify the parameters which may limit the performances of the device. The overall agreement is very good, and has been verified on our nano-mechanical version of the device.

AB - We have studied the first three symmetric out-of-plane flexural resonance modes of a goalpost silicon micro-mechanical device. Measurements have been performed at 4.2 K in vacuum, demonstrating high Qs and good linear properties. Numerical simulations have been realized to fit the resonance frequencies and produce the mode shapes. These mode shapes are complex, since they involve distortions of two coupled orthogonal bars. Nonetheless, analytic expressions have been developed to reproduce these numerical results, with no free parameters. Owing to their generality they are extremely helpful, in particular to identify the parameters which may limit the performances of the device. The overall agreement is very good, and has been verified on our nano-mechanical version of the device.

KW - Dynamics

KW - Micro/nano-mechanics

KW - Resonance modes

U2 - 10.1007/s10909-013-0919-1

DO - 10.1007/s10909-013-0919-1

M3 - Journal article

VL - 175

SP - 442

EP - 448

JO - Journal of Low Temperature Physics

JF - Journal of Low Temperature Physics

SN - 0022-2291

IS - 1-2

ER -