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Nano-CNC machining of sub-THz vacuum electron devices

Research output: Contribution to journalJournal article

Published
  • Diana Gamzina
  • Logan Himes
  • Robert Barchfeld
  • Yuan Zheng
  • Branko Popovic
  • Claudio Paoloni
  • Eunmi Choi
  • Neville C. Luhmann Jr.
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<mark>Journal publication date</mark>10/2016
<mark>Journal</mark>IEEE Transactions on Electron Devices
Issue number10
Volume63
Number of pages7
Pages (from-to)4067-4073
Publication statusPublished
Early online date8/08/16
Original languageEnglish

Abstract

Nano-computer numerical control (CNC) machining technology is employed for the fabrication of sub-THz (100-1000 GHz) vacuum electron devices. Submicron feature tolerances and placement accuracy have been achieved and surface roughness of a few tens of nanometers has been demonstrated providing high-quality radio frequency (RF) transmission and reflection parameters on the tested circuit structures. Details of the manufacturing approach are reported for the following devices: W-band sheet beam (SB) klystron, two designs of a 220-GHz SB double-staggered grating traveling wave tube (TWT), 263-GHz SB TWT amplifier for an electron paramagnetic resonance spectrometer, 346-GHz SB backward wave oscillator for fusion plasma diagnostics, 346-GHz pencil beam backward wave oscillator, and 270-GHz pencil beam folded waveguide TWT self-driving amplifier. Application of the nano-CNC machining to nanocomposite scandate tungsten cathodes as well as to passive RF components is also discussed.

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©2016 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE