Home > Research > Publications & Outputs > Optical and electronic properties of plasma-dep...
View graph of relations

Optical and electronic properties of plasma-deposited hydrogenated amorphous carbon nitride and carbon oxide films

Research output: Contribution to Journal/MagazineJournal articlepeer-review

Published
Close
<mark>Journal publication date</mark>22/06/2005
<mark>Journal</mark>Thin Solid Films
Issue number1-2
Volume482
Number of pages10
Pages (from-to)24-33
Publication StatusPublished
<mark>Original language</mark>English
EventEMRS 2004 SPRING MEETING - Strasbourg, France
Duration: 24/05/2004 → …

Conference

ConferenceEMRS 2004 SPRING MEETING
Country/TerritoryFrance
CityStrasbourg
Period24/05/04 → …

Abstract

A comparative investigation of the nanostructural vs. electronic properties of DECR plasma deposited carbon nitride and carbon oxide alloys provides new insights in the changes of the sp(2)-clusters and sp(3) matrix resulting from the decrease in the average coordination number, as N and O atoms are increasingly incorporated. This review emphasizes the similar incorporation efficiency of N and O atoms in the carbon matrix as a function of the gas phase mixture (C2H2, N-2) or (C2H2, O-2), the decrease in the alloy density deduced from Nuclear Reaction Analysis and optical measurements, and the better ordering of the sp(2)-hybridized carbon phase evidenced by Raman studies. Opposite variations in the ohmic conductivity sigma(T), apparent activation energy E-ACT and hopping transport parameters (related to the localization parameter N(E-F)gamma(-3)) are found as a function of the (N/N+C) and (O/O+C) stoichiometries. This surprising result gives evidence of some competition between the improved ordering of the sp(2) phase shown by Raman spectra in both alloys (stronger in a-C1-xNx:H with a large influence of aromatic clusters) and the increasing polymer-like character of the sp(3) matrix, dominant in a-C1-xOx:H films where the weaker connectivity of the sp(3) matrix is attributed to two-fold bonded oxygen atoms C-O-C and terminating C=O groups. The role of pi and pi* states localization is discussed in the context of bandtail hopping conductivity.