12,000

We have over 12,000 students, from over 100 countries, within one of the safest campuses in the UK

93%

93% of Lancaster students go into work or further study within six months of graduating

Home > Research > Publications & Outputs > Sensor Testing Through Bias Superposition.
View graph of relations

« Back

Sensor Testing Through Bias Superposition.

Research output: Contribution to journalJournal article

Published

Associated organisational unit

Journal publication date1/05/2007
JournalSensors and Actuators A Physical
Journal number1
Volume136
Number of pages15
Pages441-455
Original languageEnglish

Abstract

A novel on-line monitoring technique for integrated MEMS is presented based on injection of an electrical test stimulus into the bias structure through both superposition or modulation. The techniques “bias superposition and bias modulation” both support integrated structural test that targets both production test and on-line condition monitoring through generation of dependability metric. It can in some cases be used to provide the raw data for on-line calibration and compensation. The techniques are demonstrated on three integrated MEMS structures from the field of consumer electronics, aerospace and environmental sensing and have been successfully applied to a thick film conductance sensor.

Bibliographic note

The first full paper on a new on-line embedded test strategy for MEMS, where my team developed the concept and extended it in collaboration with CNRS (Montpellier), University of Paris Sud and QinetiQ UK. The concepts are applied to three very different demonstrators, two industrial, one academic. Results from one of the demonstrators are being further developed for industrial application (ref RJBunyan@QinetiQ.com) Academic impact maximised through financial support and dissemination activities care of the EU FP6 Network of Excellence in Design for Micro & Nano-Manufacture (507255) and DTI Foresight Vehicle Project GR/N36271/01 'Design for Reliability for Electronics in Automotive Manufacture. RAE_import_type : Journal article RAE_uoa_type : General Engineering