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Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity

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Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity. / Thiruvenkatanathan, P.; Yan, J.; Woodhouse, J. et al.
In: Applied Physics Letters, Vol. 96, No. 8, 081913, 22.02.2010.

Research output: Contribution to Journal/Magazine › Journal article › peer-review

Harvard

Thiruvenkatanathan, P, Yan, J, Woodhouse, J, Aziz, A & Seshia, AA 2010, 'Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity', Applied Physics Letters, vol. 96, no. 8, 081913. https://doi.org/10.1063/1.3315877

APA

Thiruvenkatanathan, P., Yan, J., Woodhouse, J., Aziz, A., & Seshia, A. A. (2010). Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity. Applied Physics Letters, 96(8), Article 081913. https://doi.org/10.1063/1.3315877

Vancouver

Thiruvenkatanathan P, Yan J, Woodhouse J, Aziz A, Seshia AA. Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity. Applied Physics Letters. 2010 Feb 22;96(8):081913. doi: 10.1063/1.3315877

Author

Thiruvenkatanathan, P. ; Yan, J. ; Woodhouse, J. et al. / Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity. In: Applied Physics Letters. 2010 ; Vol. 96, No. 8.

Bibtex

@article{3fbf96fe69e24f4e86501cb2b05406f3,
title = "Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity",
abstract = "We use the phenomena of mode localization and vibration confinement in pairs of weakly coupled, nearly identical microelectromechanical (MEMS) resonators as an ultrasensitive technique of detecting added mass on the resonator. The variations in the eigenstates for induced mass additions are studied and compared with corresponding resonant frequency shifts in pairs of MEMS resonators that are coupled electrostatically. We demonstrate that the relative shifts in the eigenstates can be over three orders of magnitude greater than those in resonant frequency for the same addition of mass. We also investigate the effects of voltage controlled electrical spring tuning on the parametric sensitivity of such sensors and demonstrate sensitivities tunable by over 400%.",
keywords = "micromechanical resonators, localised states, electric sensing devices, IRREGULARITY, mass measurement",
author = "P. Thiruvenkatanathan and J. Yan and J. Woodhouse and A. Aziz and Seshia, {A. A.}",
year = "2010",
month = feb,
day = "22",
doi = "10.1063/1.3315877",
language = "English",
volume = "96",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Inc.",
number = "8",

}

RIS

TY - JOUR

T1 - Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity

AU - Thiruvenkatanathan, P.

AU - Yan, J.

AU - Woodhouse, J.

AU - Aziz, A.

AU - Seshia, A. A.

PY - 2010/2/22

Y1 - 2010/2/22

N2 - We use the phenomena of mode localization and vibration confinement in pairs of weakly coupled, nearly identical microelectromechanical (MEMS) resonators as an ultrasensitive technique of detecting added mass on the resonator. The variations in the eigenstates for induced mass additions are studied and compared with corresponding resonant frequency shifts in pairs of MEMS resonators that are coupled electrostatically. We demonstrate that the relative shifts in the eigenstates can be over three orders of magnitude greater than those in resonant frequency for the same addition of mass. We also investigate the effects of voltage controlled electrical spring tuning on the parametric sensitivity of such sensors and demonstrate sensitivities tunable by over 400%.

AB - We use the phenomena of mode localization and vibration confinement in pairs of weakly coupled, nearly identical microelectromechanical (MEMS) resonators as an ultrasensitive technique of detecting added mass on the resonator. The variations in the eigenstates for induced mass additions are studied and compared with corresponding resonant frequency shifts in pairs of MEMS resonators that are coupled electrostatically. We demonstrate that the relative shifts in the eigenstates can be over three orders of magnitude greater than those in resonant frequency for the same addition of mass. We also investigate the effects of voltage controlled electrical spring tuning on the parametric sensitivity of such sensors and demonstrate sensitivities tunable by over 400%.

KW - micromechanical resonators

KW - localised states

KW - electric sensing devices

KW - IRREGULARITY

KW - mass measurement

U2 - 10.1063/1.3315877

DO - 10.1063/1.3315877

M3 - Journal article

VL - 96

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 8

M1 - 081913

ER -