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Ultrasonic force microscopy in waveguide mode up to 100 MHz

Research output: Contribution in Book/Report/ProceedingsConference contribution

Published

  • K. Inagaki
  • Oleg Kolosov
  • G. Andrew D. Briggs
  • S. Muto
  • Y. Horisaki
  • O. B. Wright
Publication date1998
Host publicationUltrasonics Symposium, 1998. Proceedings., 1998 IEEE
EditorsS. C. Schneider, M. Levy, B. R. McAvoy
Place of publicationNew York
PublisherIEEE
Pages1255-1259
Number of pages5
Volume2
ISBN (Print)0-7803-4096-5
Original languageEnglish

Conference

Conference1998 IEEE Ultrasonics Symposium
CitySENDAI
Period5/10/988/10/98

Conference

Conference1998 IEEE Ultrasonics Symposium
CitySENDAI
Period5/10/988/10/98

Abstract

We present experimental results that extend the frequency range of ultrasonic force microscopy (UFM) to 100 MHz, operating in a mode in which the cantilever base is vibrated. In this "waveguide-UFM" mode flexural ultrasonic vibrations are launched down the cantilever as in a waveguide, without exciting any particular cantilever resonance. The nonlinearity of the tip-sample force-distance curve allows the conversion of a modulated ultrasonic frequency into a low frequency vibration of the cantilever, detected using an optical lever at the modulation frequency in an conventional atomic force microscope. Experiments were performed on a sample of InAs self-assembled quantum dots on a GaAs substrate. The dots, of order 10-100 nm in diameter, were clearly resolved up to operating frequencies similar to 100 MHZ, demonstrating the difference in elastic properties. Images were also obtained for a polycrystalline chromium film structure deposited on a silicon substrate.