Home > Research > Browse

Results for Trench

Publications & Outputs

  1. Megasonic agitation for enhanced electrodeposition of copper

    Kaufmann, J. G., Desmulliez, M. P. Y., Tian, Y., Price, D., Hughes, M., Strusevich, N., Bailey, C., Liu, C. & Hutt, D., 08/2009, In: Microsystem Technologies. 15, 8, p. 1245-1254 10 p.

    Research output: Contribution to Journal/MagazineJournal articlepeer-review