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Results for erbium implantation

Publications & Outputs

  1. Electrical and structural characterization of defects introduced in p-SiGe during low energy erbium implantation

    Mamor, M., Pipeleers, B., Auret, F. D., Maes, J., Hayne, M., Moshchalkov, V. V. & Vantomme, A., 15/12/2003, In: Materials Science and Engineering: B . 105, 1-3, p. 179-183 5 p.

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