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Results for nanoscale metrology
Publications & Outputs
High-accuracy analysis of nanoscale semiconductor layers using beam-exit Ar-ion polishing and scanning probe microscopy
Robson, A.
, Grishin, I.,
Young, R.
, Sanchez, A. M.,
Kolosov, O.
&
Hayne, M.
,
2013
,
In:
ACS Applied Materials and Interfaces.
5
,
8
,
p. 3241-3245
5 p.
Research output
:
Contribution to Journal/Magazine
›
Journal article
›
peer-review