Results for three dimensional mapping

Publications & Outputs

1. Method and apparatus for ion beam polishing

   Kolosov, O. (Inventor) & Grishin, I. (Inventor), 2011, IPC No. G01N 1104 (2006.01); HOlJ 371305 (2006.01); G01N 1132 (2006.01), Patent No. WO/2011/101613

   Research output: Patent