Results for ultrasonic imaging

Publications & Outputs

1. Nanometer-scale mechanical imaging of aluminum damascene interconnect structures in a low-dielectric-constant polymer.

   Kolosov, O., Briggs, G. A. D., Geer, R. E. & Shekhawat, G. S., 1/04/2002, In: Journal of Applied Physics. 91, 7, p. 4549-4555 7 p.

   Research output: Contribution to Journal/Magazine › Journal article › peer-review