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Atomic Layer Deposition for Lancaster Quantum Technology Centre Cleanroom

Project: Research

Status	Finished
Effective start/end date	29/11/19 → 28/05/21

Funding

EPSRC: £150,000.00

Hayne, Manus (Principal Investigator)
Young, Robert (Co-Investigator)
Heathwaite, Louise (Co-Investigator)
Heathwaite, Louise (Co-Investigator)

Research outputs

ULTRARAM: A Low-Energy, High-Endurance, Compound-Semiconductor Memory on Silicon
Research output: Contribution to Journal/Magazine › Journal article › peer-review