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A multi-mode MEMS sensor design to support system test and health & usage monitoring applications

Research output: Contribution in Book/Report/ProceedingsConference contribution


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Publication date1/05/2010
Host publicationTest Symposium (ETS), 2010 15th IEEE European
Number of pages1
Original languageEnglish


Health and usage monitoring (HUMS) as a technique for online test, diagnosis or prognosis of structures and systems has evolved as a key technology for future critical systems. The application of HUMS technology requires a portfolio of reliable miniaturized sensors, capable of delivering "intelligence" on the internal and external environment of a system or structure. This paper proposes a fault tolerant sensor architecture and demonstrates the feasibility of realising this architecture through the design of a dual mode humidity/pressure MEMS sensor with an integrated temperature function. The sensor has a simple structure, good linearity and sensitivity, and the potential for implementation of built-in Self-test features. We also propose a re-configurable sensor network based on the multi-functional sensor concept that supports both normal operational and fail safe modes. The architecture has the potential to significantly increase system reliability and supports a reduction in the number of sensors required in future HUMS devices. The technique has potential in a wide range of applications, especially within wireless sensor networks.