TY - GEN

T1 - A multi-mode MEMS sensor design to support system test and health & usage monitoring applications

AU - Xu, Z.

AU - Richardson, A.

AU - Koltsov, D.

AU - Li, L.

AU - Begbie, M.

AU - Wang, C

PY - 2010/5/1

Y1 - 2010/5/1

N2 - Health and usage monitoring (HUMS) as a technique for online test, diagnosis or prognosis of structures and systems has evolved as a key technology for future critical systems. The application of HUMS technology requires a portfolio of reliable miniaturized sensors, capable of delivering "intelligence" on the internal and external environment of a system or structure. This paper proposes a fault tolerant sensor architecture and demonstrates the feasibility of realising this architecture through the design of a dual mode humidity/pressure MEMS sensor with an integrated temperature function. The sensor has a simple structure, good linearity and sensitivity, and the potential for implementation of built-in Self-test features. We also propose a re-configurable sensor network based on the multi-functional sensor concept that supports both normal operational and fail safe modes. The architecture has the potential to significantly increase system reliability and supports a reduction in the number of sensors required in future HUMS devices. The technique has potential in a wide range of applications, especially within wireless sensor networks.

AB - Health and usage monitoring (HUMS) as a technique for online test, diagnosis or prognosis of structures and systems has evolved as a key technology for future critical systems. The application of HUMS technology requires a portfolio of reliable miniaturized sensors, capable of delivering "intelligence" on the internal and external environment of a system or structure. This paper proposes a fault tolerant sensor architecture and demonstrates the feasibility of realising this architecture through the design of a dual mode humidity/pressure MEMS sensor with an integrated temperature function. The sensor has a simple structure, good linearity and sensitivity, and the potential for implementation of built-in Self-test features. We also propose a re-configurable sensor network based on the multi-functional sensor concept that supports both normal operational and fail safe modes. The architecture has the potential to significantly increase system reliability and supports a reduction in the number of sensors required in future HUMS devices. The technique has potential in a wide range of applications, especially within wireless sensor networks.

KW - HUMS technology

KW - built-in self test feature

KW - dual mode humidity pressure MEMS sensor

KW - fault tolerant sensor architecture

KW - health monitoring

KW - integrated temperature function

KW - multifunctional sensor

KW - multimode MEMS sensor

KW - online diagnosis

KW - online test

KW - reconfigurable sensor network

KW - reliable miniaturized sensor

KW - usage monitoring

KW - wireless sensor networks

KW - humidity sensors

KW - microsensors

KW - pressure sensors

U2 - 10.1109/ETSYM.2010.5512728

DO - 10.1109/ETSYM.2010.5512728

M3 - Conference contribution/Paper

SP - 263

BT - Test Symposium (ETS), 2010 15th IEEE European

ER -