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Construction of nonlinear dynamic MEMS component models using cosserat theory.

Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSNChapter

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Publication date05/2003
Host publicationProceedings of the SPIE design, test, integration and packaging of MEMS symposium
Place of PublicationFrance
PublisherCannes Mandelieu
<mark>Original language</mark>English