Research output: Contribution to Journal/Magazine › Journal article › peer-review
Research output: Contribution to Journal/Magazine › Journal article › peer-review
}
TY - JOUR
T1 - Growth and structural characterization of pyramidal site-controlled quantum dots with high uniformity and spectral purity
AU - Dimastrodonato, Valeria
AU - Mereni, Lorenzo O.
AU - Young, Robert J.
AU - Pelucchi, Emanuele
PY - 2010/8
Y1 - 2010/8
N2 - This work presents some fundamental features of pyramidal site-controlled In GaAs Quantum Dots (QDs) grown by metal-organic vapour phase epitaxy on patterned GaAs (111)B substrate. The dots self-form inside pyramidal recesses patterned on the wafer via pre-growth processing. The major advantage of this growth technique is the control it provides over the dot nucleation position and the dimensions of the confined structures onto the substrate. The fundamental steps of substrate patterning and the QD formation mechanism are described together with a discussion of the structural particulars. The post-growth processes, including surface etching and substrate removal, which are required to facilitate optical characterization, are discussed. With this approach extremely high uniformity and record spectral purity are both achieved.
AB - This work presents some fundamental features of pyramidal site-controlled In GaAs Quantum Dots (QDs) grown by metal-organic vapour phase epitaxy on patterned GaAs (111)B substrate. The dots self-form inside pyramidal recesses patterned on the wafer via pre-growth processing. The major advantage of this growth technique is the control it provides over the dot nucleation position and the dimensions of the confined structures onto the substrate. The fundamental steps of substrate patterning and the QD formation mechanism are described together with a discussion of the structural particulars. The post-growth processes, including surface etching and substrate removal, which are required to facilitate optical characterization, are discussed. With this approach extremely high uniformity and record spectral purity are both achieved.
U2 - 10.1002/pssb.200983803
DO - 10.1002/pssb.200983803
M3 - Journal article
VL - 247
SP - 1862
EP - 1866
JO - physica status solidi (b)
JF - physica status solidi (b)
SN - 0370-1972
IS - 8
ER -