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Results for sputter etching

Publications & Outputs

  1. Nanometer-scale mechanical imaging of aluminum damascene interconnect structures in a low-dielectric-constant polymer.

    Kolosov, O., Briggs, G. A. D., Geer, R. E. & Shekhawat, G. S., 1/04/2002, In: Journal of Applied Physics. 91, 7, p. 4549-4555 7 p.

    Research output: Contribution to journalJournal articlepeer-review

  2. Room temperature extraordinary magnetoresistance of nonmagnetic narrow-gap semiconductor/metal composites: application to read-head sensors for ultrahigh-density magnetic recording

    Solin, S. A., Hines, D. R., Tsai, J-S., Pashkin, Y., Chung, S. J., Goel, N. & Santos, M., 01/2002, In: IEEE Transactions on Magnetics. 38, 1, p. 89-94 6 p.

    Research output: Contribution to journalJournal articlepeer-review