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Engineering of Microwaves, Terahertz and Light (E-MIT)

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A built-in test solution for a SMART silicon micromachined resonant pressure sensor.

Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Chapter

Published

C. Jeffery
R. Rosing
A. M. D. Richardson

Publication date	2000
Host publication	IEEE European Test Workshop
Publisher	IEEE
ISBN (print)	0-7695-0701-8.
<mark>Original language</mark>	English