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A SU8 micromachined WR-1.5 band waveguide filter

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<mark>Journal publication date</mark>2013
<mark>Journal</mark>IEEE Microwave and Wireless Components Letters
Issue number6
Volume23
Number of pages3
Pages (from-to)300-302
Publication StatusPublished
<mark>Original language</mark>English

Abstract

A WR-1.5 band (500-750 GHz) waveguide 3rd order bandpass filter has been designed, fabricated, using SU8 photoresist technology, tested and presented. The filter is composed of three silver-coated SU8 layers, each of the same nominal thickness of 191 μm. This filter structure is based on three offset resonators. This novel structure is ideally suitable for the layered SU8 micromachining process. The filter exhibits a 53.7 GHz 3-dB bandwidth at a central frequency of 671 GHz. The median passband insertion loss is measured to be 0.65 dB and the return loss is better than 11 dB over the whole passband.