Research output: Contribution to Journal/Magazine › Journal article › peer-review
Research output: Contribution to Journal/Magazine › Journal article › peer-review
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TY - JOUR
T1 - Defining plasma polymerization
T2 - new insight into what we should be measuring
AU - Michelmore, Andrew
AU - Charles, Christine
AU - Boswell, Rod W.
AU - Short, Robert D.
AU - Whittle, Jason D.
PY - 2013/6/26
Y1 - 2013/6/26
N2 - External parameters (RF power and precursor flow rate) are typically quoted to define plasma polymerization experiments. Utilizing a parallel-plate electrode reactor with variable geometry, it is shown that these parameters cannot be transferred to reactors with different geometries in order to reproduce plasma polymer films using four precursors. Measurements of ion flux and power coupling efficiency confirm that intrinsic plasma properties vary greatly with reactor geometry at constant applied RF power. It is further demonstrated that controlling intrinsic parameters, in this case the ion flux, offers a more widely applicable method of defining plasma polymerization processes, particularly for saturated and allylic precursors.
AB - External parameters (RF power and precursor flow rate) are typically quoted to define plasma polymerization experiments. Utilizing a parallel-plate electrode reactor with variable geometry, it is shown that these parameters cannot be transferred to reactors with different geometries in order to reproduce plasma polymer films using four precursors. Measurements of ion flux and power coupling efficiency confirm that intrinsic plasma properties vary greatly with reactor geometry at constant applied RF power. It is further demonstrated that controlling intrinsic parameters, in this case the ion flux, offers a more widely applicable method of defining plasma polymerization processes, particularly for saturated and allylic precursors.
KW - plasma polymerization
KW - deposition rate
KW - functional retention
KW - ion flux
KW - GLOW DISCHARGE POLYMERIZATION
KW - CHEMICAL-VAPOR-DEPOSITION
KW - ACRYLIC-ACID
KW - ION ENERGY
KW - PROPANOIC ACID
KW - FILMS
KW - CHEMISTRY
KW - SURFACE
KW - GROWTH
KW - NANOPARTICLES
U2 - 10.1021/am401484b
DO - 10.1021/am401484b
M3 - Journal article
VL - 5
SP - 5387
EP - 5391
JO - ACS Applied Materials and Interfaces
JF - ACS Applied Materials and Interfaces
SN - 1944-8244
IS - 12
ER -