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Defining plasma polymerization: new insight into what we should be measuring

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Defining plasma polymerization: new insight into what we should be measuring. / Michelmore, Andrew; Charles, Christine; Boswell, Rod W. et al.
In: ACS Applied Materials and Interfaces, Vol. 5, No. 12, 26.06.2013, p. 5387-5391.

Research output: Contribution to Journal/Magazine › Journal article › peer-review

Harvard

Michelmore, A, Charles, C, Boswell, RW, Short, RD & Whittle, JD 2013, 'Defining plasma polymerization: new insight into what we should be measuring', ACS Applied Materials and Interfaces, vol. 5, no. 12, pp. 5387-5391. https://doi.org/10.1021/am401484b

APA

Michelmore, A., Charles, C., Boswell, R. W., Short, R. D., & Whittle, J. D. (2013). Defining plasma polymerization: new insight into what we should be measuring. ACS Applied Materials and Interfaces, 5(12), 5387-5391. https://doi.org/10.1021/am401484b

Vancouver

Michelmore A, Charles C, Boswell RW, Short RD, Whittle JD. Defining plasma polymerization: new insight into what we should be measuring. ACS Applied Materials and Interfaces. 2013 Jun 26;5(12):5387-5391. Epub 2013 Jun 12. doi: 10.1021/am401484b

Author

Michelmore, Andrew ; Charles, Christine ; Boswell, Rod W. et al. / Defining plasma polymerization : new insight into what we should be measuring. In: ACS Applied Materials and Interfaces. 2013 ; Vol. 5, No. 12. pp. 5387-5391.

Bibtex

@article{435454b2fb83467db397626265722469,
title = "Defining plasma polymerization: new insight into what we should be measuring",
abstract = "External parameters (RF power and precursor flow rate) are typically quoted to define plasma polymerization experiments. Utilizing a parallel-plate electrode reactor with variable geometry, it is shown that these parameters cannot be transferred to reactors with different geometries in order to reproduce plasma polymer films using four precursors. Measurements of ion flux and power coupling efficiency confirm that intrinsic plasma properties vary greatly with reactor geometry at constant applied RF power. It is further demonstrated that controlling intrinsic parameters, in this case the ion flux, offers a more widely applicable method of defining plasma polymerization processes, particularly for saturated and allylic precursors.",
keywords = "plasma polymerization, deposition rate, functional retention, ion flux, GLOW DISCHARGE POLYMERIZATION, CHEMICAL-VAPOR-DEPOSITION, ACRYLIC-ACID, ION ENERGY, PROPANOIC ACID, FILMS, CHEMISTRY, SURFACE, GROWTH, NANOPARTICLES",
author = "Andrew Michelmore and Christine Charles and Boswell, {Rod W.} and Short, {Robert D.} and Whittle, {Jason D.}",
year = "2013",
month = jun,
day = "26",
doi = "10.1021/am401484b",
language = "English",
volume = "5",
pages = "5387--5391",
journal = "ACS Applied Materials and Interfaces",
issn = "1944-8244",
publisher = "American Chemical Society",
number = "12",

}

RIS

TY - JOUR

T1 - Defining plasma polymerization

T2 - new insight into what we should be measuring

AU - Michelmore, Andrew

AU - Charles, Christine

AU - Boswell, Rod W.

AU - Short, Robert D.

AU - Whittle, Jason D.

PY - 2013/6/26

Y1 - 2013/6/26

N2 - External parameters (RF power and precursor flow rate) are typically quoted to define plasma polymerization experiments. Utilizing a parallel-plate electrode reactor with variable geometry, it is shown that these parameters cannot be transferred to reactors with different geometries in order to reproduce plasma polymer films using four precursors. Measurements of ion flux and power coupling efficiency confirm that intrinsic plasma properties vary greatly with reactor geometry at constant applied RF power. It is further demonstrated that controlling intrinsic parameters, in this case the ion flux, offers a more widely applicable method of defining plasma polymerization processes, particularly for saturated and allylic precursors.

AB - External parameters (RF power and precursor flow rate) are typically quoted to define plasma polymerization experiments. Utilizing a parallel-plate electrode reactor with variable geometry, it is shown that these parameters cannot be transferred to reactors with different geometries in order to reproduce plasma polymer films using four precursors. Measurements of ion flux and power coupling efficiency confirm that intrinsic plasma properties vary greatly with reactor geometry at constant applied RF power. It is further demonstrated that controlling intrinsic parameters, in this case the ion flux, offers a more widely applicable method of defining plasma polymerization processes, particularly for saturated and allylic precursors.

KW - plasma polymerization

KW - deposition rate

KW - functional retention

KW - ion flux

KW - GLOW DISCHARGE POLYMERIZATION

KW - CHEMICAL-VAPOR-DEPOSITION

KW - ACRYLIC-ACID

KW - ION ENERGY

KW - PROPANOIC ACID

KW - FILMS

KW - CHEMISTRY

KW - SURFACE

KW - GROWTH

KW - NANOPARTICLES

U2 - 10.1021/am401484b

DO - 10.1021/am401484b

M3 - Journal article

VL - 5

SP - 5387

EP - 5391

JO - ACS Applied Materials and Interfaces

JF - ACS Applied Materials and Interfaces

SN - 1944-8244

IS - 12

ER -