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Research output: Contribution to Journal/Magazine › Journal article › peer-review
Research output: Contribution to Journal/Magazine › Journal article › peer-review
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TY - JOUR
T1 - Design and simulation of a multi-function MEMS sensor for health and usage monitoring.
AU - Xu, Z.
AU - Kotsov, Denis
AU - Richardson, Andrew
AU - Li, L.
AU - Begbie, Mark
N1 - "©2010 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE." "This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder."
PY - 2010/1/12
Y1 - 2010/1/12
N2 - Health and usage monitoring as a technique for online test, diagnosis or prognosis of structures and systems has evolved as a key technology for future critical systems. The technology, often referred to as HUMS is usually based around sensors that must be more reliable than the system or structure they are monitoring. This paper proposes a fault tolerant sensor architecture and demonstrates the feasibility of realising this architecture through the design of a dual mode humidity/pressure MEMS sensor with an integrated temperature function. The sensor has a simple structure, good linearity and sensitivity, and the potential for implementation of built-in-self-test features. We also propose a re-configurable sensor network based on the multi-functional sensor concept that supports both normal operational and fail safe modes. The architecture has the potential to significantly increase system reliability and supports a reduction in the number of sensors required in future HUMS devices. The technique has potential in a wide range of applications, especially within wireless sensor networks.
AB - Health and usage monitoring as a technique for online test, diagnosis or prognosis of structures and systems has evolved as a key technology for future critical systems. The technology, often referred to as HUMS is usually based around sensors that must be more reliable than the system or structure they are monitoring. This paper proposes a fault tolerant sensor architecture and demonstrates the feasibility of realising this architecture through the design of a dual mode humidity/pressure MEMS sensor with an integrated temperature function. The sensor has a simple structure, good linearity and sensitivity, and the potential for implementation of built-in-self-test features. We also propose a re-configurable sensor network based on the multi-functional sensor concept that supports both normal operational and fail safe modes. The architecture has the potential to significantly increase system reliability and supports a reduction in the number of sensors required in future HUMS devices. The technique has potential in a wide range of applications, especially within wireless sensor networks.
KW - HUMS
KW - multi-mode sensing
KW - humidity sensor
KW - pressure sensor
KW - sensor network
KW - sensor reliability
KW - built-in-self-test
KW - online test
KW - self-repair
KW - bias superposition
KW - wireless sensor network.
U2 - 10.1109/PHM.2010.5413415
DO - 10.1109/PHM.2010.5413415
M3 - Journal article
SP - 1
EP - 7
JO - Proceedings of IEEE Prognostics & System Health Management Conference
JF - Proceedings of IEEE Prognostics & System Health Management Conference
ER -