Standard
Direct e-beam lithography of PDMS. / Bowen, James
; Cheneler, David; Robinson, Alex.
2011. Poster session presented at MNE 2011, 37th International Conference on Micro and Nano Engineering, Berlin, Germany.
Research output: Contribution to conference - Without ISBN/ISSN › Poster
Harvard
Bowen, J
, Cheneler, D & Robinson, A 2011, '
Direct e-beam lithography of PDMS', MNE 2011, 37th International Conference on Micro and Nano Engineering, Berlin, Germany,
19/09/11 -
23/09/11.
APA
Vancouver
Author
Bibtex
@conference{d99ad568ff2b403688ce63333832ecab,
title = "Direct e-beam lithography of PDMS",
author = "James Bowen and David Cheneler and Alex Robinson",
year = "2011",
language = "English",
note = "MNE 2011, 37th International Conference on Micro and Nano Engineering ; Conference date: 19-09-2011 Through 23-09-2011",
}
RIS
TY - CONF
T1 - Direct e-beam lithography of PDMS
AU - Bowen, James
AU - Cheneler, David
AU - Robinson, Alex
PY - 2011
Y1 - 2011
M3 - Poster
T2 - MNE 2011, 37th International Conference on Micro and Nano Engineering
Y2 - 19 September 2011 through 23 September 2011
ER -
