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Electronic and ionic processes and ionic bombardment of the cathode in a DC hydrogen glow discharge

Research output: Contribution to journalJournal articlepeer-review

Published
<mark>Journal publication date</mark>14/03/1989
<mark>Journal</mark>Journal of Physics D: Applied Physics
Issue number3
Volume22
Number of pages18
Pages (from-to)413-430
Publication StatusPublished
<mark>Original language</mark>English

Abstract

The ionic and electronic reactions occurring in the cathode dark space (CDS) and negative glow (NG) of a hydrogen glow discharge with operating parameters typical of those used in surface treatments are modelled to calculate the angular and energy distributions of the ions incident on the cathode. The self-consistent model comprises three interactive sub-models, two of which are based on Monte Carlo simulations of electrons and positive ions, the third on conservation and mobility equations and is used for the determination of the ions' diffusion current from the NG to the CDS. Where available, reaction cross sections are taken from the literature with estimates being made for those such as H3+ to H+ which are not documented. An experimental determination of the energy of H+, H2+ and H3+ ions arriving at the cathode of the discharge is described and it is shown that the hydrogen ion currents predicted by the model are in accordance with those measured experimentally.