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Fabrication and analysis of cylindrical resin AFM microcantilevers

Research output: Contribution to Journal/Magazine › Journal article › peer-review

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Fabrication and analysis of cylindrical resin AFM microcantilevers. / Cheneler, D.; Bowen, J.; Leigh, S. J. et al.
In: Ultramicroscopy, Vol. 111, No. 8, 07.2011, p. 1214-1223.

Research output: Contribution to Journal/Magazine › Journal article › peer-review

Harvard

Cheneler, D, Bowen, J, Leigh, SJ, Purssell, CP, Billson, DR, Hutchins, DA & Ward, MCL 2011, 'Fabrication and analysis of cylindrical resin AFM microcantilevers', Ultramicroscopy, vol. 111, no. 8, pp. 1214-1223. https://doi.org/10.1016/j.ultramic.2011.03.009

APA

Cheneler, D., Bowen, J., Leigh, S. J., Purssell, C. P., Billson, D. R., Hutchins, D. A., & Ward, M. C. L. (2011). Fabrication and analysis of cylindrical resin AFM microcantilevers. Ultramicroscopy, 111(8), 1214-1223. https://doi.org/10.1016/j.ultramic.2011.03.009

Vancouver

Cheneler D, Bowen J, Leigh SJ, Purssell CP, Billson DR, Hutchins DA et al. Fabrication and analysis of cylindrical resin AFM microcantilevers. Ultramicroscopy. 2011 Jul;111(8):1214-1223. doi: 10.1016/j.ultramic.2011.03.009

Author

Cheneler, D. ; Bowen, J. ; Leigh, S. J. et al. / Fabrication and analysis of cylindrical resin AFM microcantilevers. In: Ultramicroscopy. 2011 ; Vol. 111, No. 8. pp. 1214-1223.

Bibtex

@article{136cc62156ff44109deccc824e773dcf,
title = "Fabrication and analysis of cylindrical resin AFM microcantilevers",
abstract = "In this paper a new method of fabricating cylindrical resin microcantilevers using the Direct Digital Manufacturing (DDM) technique of Micro-stereolithography (MSL) is described. The method is rapid and commercially viable, allowing the fabrication of atomic force microscope (AFM) cantilevers which exhibit much larger spring constants than those currently commercial available. This allows for experimentation in a force regime orders of magnitude higher than currently possible using the AFM. This makes these cantilevers ideally suited for AFM-based depth sensing indentation. Due to their geometry, the assumptions used in the standard Euler-Bernoulli beam theory usually used to analyse AFM cantilevers may no longer be valid. Therefore approximate analytical solutions based on Timoshenko beam theory have been derived for the stiffness and resonant frequency of these cantilevers. Prototypes of the cantilevers have been fabricated and tested. Results show good agreement between experiment and theory.",
keywords = "Atomic force microscope, Cantilever, Direct Digital Manufacturing, Timoshenko, Indentation",
author = "D. Cheneler and J. Bowen and Leigh, {S. J.} and Purssell, {C. P.} and Billson, {D. R.} and Hutchins, {D. A.} and Ward, {M. C. L.}",
year = "2011",
month = jul,
doi = "10.1016/j.ultramic.2011.03.009",
language = "English",
volume = "111",
pages = "1214--1223",
journal = "Ultramicroscopy",
issn = "0304-3991",
publisher = "Elsevier Science B.V.",
number = "8",

}

RIS

TY - JOUR

T1 - Fabrication and analysis of cylindrical resin AFM microcantilevers

AU - Cheneler, D.

AU - Bowen, J.

AU - Leigh, S. J.

AU - Purssell, C. P.

AU - Billson, D. R.

AU - Hutchins, D. A.

AU - Ward, M. C. L.

PY - 2011/7

Y1 - 2011/7

N2 - In this paper a new method of fabricating cylindrical resin microcantilevers using the Direct Digital Manufacturing (DDM) technique of Micro-stereolithography (MSL) is described. The method is rapid and commercially viable, allowing the fabrication of atomic force microscope (AFM) cantilevers which exhibit much larger spring constants than those currently commercial available. This allows for experimentation in a force regime orders of magnitude higher than currently possible using the AFM. This makes these cantilevers ideally suited for AFM-based depth sensing indentation. Due to their geometry, the assumptions used in the standard Euler-Bernoulli beam theory usually used to analyse AFM cantilevers may no longer be valid. Therefore approximate analytical solutions based on Timoshenko beam theory have been derived for the stiffness and resonant frequency of these cantilevers. Prototypes of the cantilevers have been fabricated and tested. Results show good agreement between experiment and theory.

AB - In this paper a new method of fabricating cylindrical resin microcantilevers using the Direct Digital Manufacturing (DDM) technique of Micro-stereolithography (MSL) is described. The method is rapid and commercially viable, allowing the fabrication of atomic force microscope (AFM) cantilevers which exhibit much larger spring constants than those currently commercial available. This allows for experimentation in a force regime orders of magnitude higher than currently possible using the AFM. This makes these cantilevers ideally suited for AFM-based depth sensing indentation. Due to their geometry, the assumptions used in the standard Euler-Bernoulli beam theory usually used to analyse AFM cantilevers may no longer be valid. Therefore approximate analytical solutions based on Timoshenko beam theory have been derived for the stiffness and resonant frequency of these cantilevers. Prototypes of the cantilevers have been fabricated and tested. Results show good agreement between experiment and theory.

KW - Atomic force microscope

KW - Cantilever

KW - Direct Digital Manufacturing

KW - Timoshenko

KW - Indentation

U2 - 10.1016/j.ultramic.2011.03.009

DO - 10.1016/j.ultramic.2011.03.009

M3 - Journal article

C2 - 21763665

VL - 111

SP - 1214

EP - 1223

JO - Ultramicroscopy

JF - Ultramicroscopy

SN - 0304-3991

IS - 8

ER -