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Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss

Research output: Contribution to Journal/Magazine › Journal article › peer-review

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Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss. / Tian, Yingtao; Shang, Xiaobang; Lancaster, Michael J.
In: Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 13, No. 1, 013002, 01.2014.

Research output: Contribution to Journal/Magazine › Journal article › peer-review

Harvard

Tian, Y, Shang, X & Lancaster, MJ 2014, 'Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss', Journal of Micro/Nanolithography, MEMS, and MOEMS, vol. 13, no. 1, 013002. https://doi.org/10.1117/1.JMM.13.1.013002

APA

Tian, Y., Shang, X., & Lancaster, M. J. (2014). Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss. Journal of Micro/Nanolithography, MEMS, and MOEMS, 13(1), Article 013002. https://doi.org/10.1117/1.JMM.13.1.013002

Vancouver

Tian Y, Shang X, Lancaster MJ. Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss. Journal of Micro/Nanolithography, MEMS, and MOEMS. 2014 Jan;13(1):013002. Epub 2014 Jan 6. doi: 10.1117/1.JMM.13.1.013002

Author

Tian, Yingtao ; Shang, Xiaobang ; Lancaster, Michael J. / Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss. In: Journal of Micro/Nanolithography, MEMS, and MOEMS. 2014 ; Vol. 13, No. 1.

Bibtex

@article{e14381613d834fbb8f46cfe9102b81d6,
title = "Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss",
abstract = "A microfabricated hollow air-filled waveguide with two back-to-back bends operating in the WR-3 frequency range of 220 to 325 GHz has been successfully fabricated through a multilayered ultrathick SU8 process and has ultralow transmission loss of 0.028 to 0.03  dB/mm in a performance test. This is the first SU8 constructed hollow waveguide operating at WR-3 frequencies having transmission loss comparable with the state-of-the-art computer numerical control (CNC) machined metal circuits. The multilayered SU8 processing technique has a great advantage of reducing the transmission loss by decreasing the probability of air gaps between SU8 layers. The excellent device performance is also attributed to the precisely controlled layer thickness and ultimately low surface roughness of evaporated silver which only contributes a small part of the microwave signal attenuation.",
author = "Yingtao Tian and Xiaobang Shang and Lancaster, {Michael J.}",
year = "2014",
month = jan,
doi = "10.1117/1.JMM.13.1.013002",
language = "English",
volume = "13",
journal = "Journal of Micro/Nanolithography, MEMS, and MOEMS",
issn = "1932-5134",
publisher = "SPIE",
number = "1",

}

RIS

TY - JOUR

T1 - Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss

AU - Tian, Yingtao

AU - Shang, Xiaobang

AU - Lancaster, Michael J.

PY - 2014/1

Y1 - 2014/1

N2 - A microfabricated hollow air-filled waveguide with two back-to-back bends operating in the WR-3 frequency range of 220 to 325 GHz has been successfully fabricated through a multilayered ultrathick SU8 process and has ultralow transmission loss of 0.028 to 0.03  dB/mm in a performance test. This is the first SU8 constructed hollow waveguide operating at WR-3 frequencies having transmission loss comparable with the state-of-the-art computer numerical control (CNC) machined metal circuits. The multilayered SU8 processing technique has a great advantage of reducing the transmission loss by decreasing the probability of air gaps between SU8 layers. The excellent device performance is also attributed to the precisely controlled layer thickness and ultimately low surface roughness of evaporated silver which only contributes a small part of the microwave signal attenuation.

AB - A microfabricated hollow air-filled waveguide with two back-to-back bends operating in the WR-3 frequency range of 220 to 325 GHz has been successfully fabricated through a multilayered ultrathick SU8 process and has ultralow transmission loss of 0.028 to 0.03  dB/mm in a performance test. This is the first SU8 constructed hollow waveguide operating at WR-3 frequencies having transmission loss comparable with the state-of-the-art computer numerical control (CNC) machined metal circuits. The multilayered SU8 processing technique has a great advantage of reducing the transmission loss by decreasing the probability of air gaps between SU8 layers. The excellent device performance is also attributed to the precisely controlled layer thickness and ultimately low surface roughness of evaporated silver which only contributes a small part of the microwave signal attenuation.

U2 - 10.1117/1.JMM.13.1.013002

DO - 10.1117/1.JMM.13.1.013002

M3 - Journal article

VL - 13

JO - Journal of Micro/Nanolithography, MEMS, and MOEMS

JF - Journal of Micro/Nanolithography, MEMS, and MOEMS

SN - 1932-5134

IS - 1

M1 - 013002

ER -