Research output: Contribution to Journal/Magazine › Journal article › peer-review
Research output: Contribution to Journal/Magazine › Journal article › peer-review
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TY - JOUR
T1 - Investigation of SU8 as a structural material for fabricating passive millimeter-wave and terahertz components
AU - Tian, Yingtao
AU - Shang, Xiaobang
AU - Wang, Yi
AU - Lancaster, Michael J.
PY - 2015/10
Y1 - 2015/10
N2 - This paper provides a systematic review of the technical issues of SU8 fabrication for millimeter-wave and terahertz components based on research carried out at the University of Birmingham in the past decade. A design-for-manufacturability approach is followed. The flexibility of the SU8 process enables many device structures. Challenges and problems during fabrication will be discussed and demonstrated with examples. The measurement of the devices is also a significant challenge when the critical dimensions of the device shrink and special testing fixtures are needed in some cases. Finally, a brief overview of the issues discussed above is given for future guidance.
AB - This paper provides a systematic review of the technical issues of SU8 fabrication for millimeter-wave and terahertz components based on research carried out at the University of Birmingham in the past decade. A design-for-manufacturability approach is followed. The flexibility of the SU8 process enables many device structures. Challenges and problems during fabrication will be discussed and demonstrated with examples. The measurement of the devices is also a significant challenge when the critical dimensions of the device shrink and special testing fixtures are needed in some cases. Finally, a brief overview of the issues discussed above is given for future guidance.
U2 - 10.1117/1.JMM.14.4.044507
DO - 10.1117/1.JMM.14.4.044507
M3 - Journal article
VL - 14
JO - Journal of Micro/Nanolithography, MEMS, and MOEMS
JF - Journal of Micro/Nanolithography, MEMS, and MOEMS
SN - 1932-5150
IS - 4
M1 - 044507
ER -