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OLED integrated silicon membranes for light-modulation devices

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OLED integrated silicon membranes for light-modulation devices. / Cheneler, David; Vervaeke, Michael ; Thienpont, Hugo et al.
Optical Sensing and Detection III. ed. / Francis Berghmans; Anna G. Mignani; Piet De Moor. SPIE, 2014. (SPIE Proceedings ; Vol. 9141).

Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review

Harvard

Cheneler, D, Vervaeke, M, Thienpont, H, Lambertini, V & Brignone, M 2014, OLED integrated silicon membranes for light-modulation devices. in F Berghmans, AG Mignani & P De Moor (eds), Optical Sensing and Detection III. SPIE Proceedings , vol. 9141, SPIE. https://doi.org/10.1117/12.2051402

APA

Cheneler, D., Vervaeke, M., Thienpont, H., Lambertini, V., & Brignone, M. (2014). OLED integrated silicon membranes for light-modulation devices. In F. Berghmans, A. G. Mignani, & P. De Moor (Eds.), Optical Sensing and Detection III (SPIE Proceedings ; Vol. 9141). SPIE. https://doi.org/10.1117/12.2051402

Vancouver

Cheneler D, Vervaeke M, Thienpont H, Lambertini V, Brignone M. OLED integrated silicon membranes for light-modulation devices. In Berghmans F, Mignani AG, De Moor P, editors, Optical Sensing and Detection III. SPIE. 2014. (SPIE Proceedings ). doi: 10.1117/12.2051402

Author

Cheneler, David ; Vervaeke, Michael ; Thienpont, Hugo et al. / OLED integrated silicon membranes for light-modulation devices. Optical Sensing and Detection III. editor / Francis Berghmans ; Anna G. Mignani ; Piet De Moor. SPIE, 2014. (SPIE Proceedings ).

Bibtex

@inproceedings{753730bfe7774498965655473eba6f6c,
title = "OLED integrated silicon membranes for light-modulation devices",
abstract = "Organic light-emitting diodes (OLEDs) are most frequently used for display purposes and while they have also been utilized in sensing applications, their innate compliance has not previously been exploited for these applications. However, in this manuscript it is shown that OLEDs are compatible with microfabrication methods used in the production of micro mechanical devices. In particular it is shown that the compliance of OLEDs can be utilized in, and not limited to, a new generation of opto-mechanical pressure sensors. A fabrication process for a light-modulating pressure sensor is described. Prototypes were fabricated and tested and the response compared to an analytical theory developed by the authors. It is shown with simple circuitry, a resolution of 11.4 Pa up to 350 kPa is attainable using this technology.",
author = "David Cheneler and Michael Vervaeke and Hugo Thienpont and Vito Lambertini and Mauro Brignone",
year = "2014",
month = may,
day = "19",
doi = "10.1117/12.2051402",
language = "English",
isbn = "9781628410891",
series = "SPIE Proceedings ",
publisher = "SPIE",
editor = "Francis Berghmans and Mignani, {Anna G.} and {De Moor}, Piet",
booktitle = "Optical Sensing and Detection III",

}

RIS

TY - GEN

T1 - OLED integrated silicon membranes for light-modulation devices

AU - Cheneler, David

AU - Vervaeke, Michael

AU - Thienpont, Hugo

AU - Lambertini, Vito

AU - Brignone, Mauro

PY - 2014/5/19

Y1 - 2014/5/19

N2 - Organic light-emitting diodes (OLEDs) are most frequently used for display purposes and while they have also been utilized in sensing applications, their innate compliance has not previously been exploited for these applications. However, in this manuscript it is shown that OLEDs are compatible with microfabrication methods used in the production of micro mechanical devices. In particular it is shown that the compliance of OLEDs can be utilized in, and not limited to, a new generation of opto-mechanical pressure sensors. A fabrication process for a light-modulating pressure sensor is described. Prototypes were fabricated and tested and the response compared to an analytical theory developed by the authors. It is shown with simple circuitry, a resolution of 11.4 Pa up to 350 kPa is attainable using this technology.

AB - Organic light-emitting diodes (OLEDs) are most frequently used for display purposes and while they have also been utilized in sensing applications, their innate compliance has not previously been exploited for these applications. However, in this manuscript it is shown that OLEDs are compatible with microfabrication methods used in the production of micro mechanical devices. In particular it is shown that the compliance of OLEDs can be utilized in, and not limited to, a new generation of opto-mechanical pressure sensors. A fabrication process for a light-modulating pressure sensor is described. Prototypes were fabricated and tested and the response compared to an analytical theory developed by the authors. It is shown with simple circuitry, a resolution of 11.4 Pa up to 350 kPa is attainable using this technology.

U2 - 10.1117/12.2051402

DO - 10.1117/12.2051402

M3 - Conference contribution/Paper

SN - 9781628410891

T3 - SPIE Proceedings

BT - Optical Sensing and Detection III

A2 - Berghmans, Francis

A2 - Mignani, Anna G.

A2 - De Moor, Piet

PB - SPIE

ER -